Mass‐resolved ion energy measurements at the grounded electrode of an argon rf plasma
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منابع مشابه
Acetylene – argon plasmas measured at an rf - biased substrate electrode for diamond - like carbon
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 1993
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.110087